Ryaguzov, A.P.; Kudabayeva, M.A.; Nemkayeva, R.R.; Guseinov, N.R; Myrzabekova, M.M.
(Publ. House of the KarSU named after acad. E.A.Buketov, 2019-06-14)
This paper considers amorphous carbon films modified with silicon oxide (а-C1-x:(SiO)х),obtained
by the method of magnetron ion-plasma co-sputtering of a combined target in an argon atmosphere.
The topography and phase ...