Abstract:
The paper considers peculiarities of ion-plasma equipment and treatment of materials in vacuum arc discharges. The advantages and the prospects of the modified ion plasma setup used for coating deposition are described. The parameters of generated arc gas and gas-metal plasma were measured and presented. Dependences of metal material surface properties on gas-discharge plasma parameters are revealed. Vacuum arc plasma-assisted deposition of multicomponent nanocrystalline coatings based on titanium nitride is presented.The effect of added elements on the structural phase state and characteristics of titanium nitride-based coatings is demonstrated.
