Ryaguzov, A.P.; Alpysbayeva, B.E.; Nemkayeva, R.R.; Aliaskarov, R.K.; Yukhnovets, O.I.; Mamyrbayeva, D.M.
(Publishing House of the KarSU named after E.A.Buketov, 2015-12-23)
In this work we perform the results of complex study of thin amorphous carbon films, produced by strongly non-equilibrium method of DC magnetron ion-plasma sputtering in Ar atmosphere. In the result of performed atomic ...