Rudenkov, A.S.; Rogachev, A.V.; Zavadski, S.M.; Golosov, D.A.; Luchnikov, P.A.; Dalskaya, G.Yu.; Vtoruchina, A.N.
(KSU Publ., 2020-06-30)
The paper considers structural and physicomechanical properties of silicon-carbon coatings deposited from
a gaseous medium in doping with nitrogen ions. The analysis of the coatings by X-ray photoelectron spectroscopy
shows ...